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ISE and Toshiba Partner to Complete the World's First Direct TCAD Integration in a Manufacturing Environment

Designed to save wafer-based experiments, and reduce cost and time (November 29, 2001)
ISE Integrated Systems Engineering AG of Zurich, Switzerland, and Toshiba Corporation Semiconductor Company have recently completed the world's first direct integration of TCAD (Technology CAD) in a manufacturing environment.

Yoshio Oida, Toshiba's General Manager, Analog and Peripheral Division, says that "Integrating TCAD into a manufacturing environment offers unique advantages in terms of process control and productivity improvement. Through TCAD, we can save wafer-based experiments, and reduce cost and time in a significant fashion. In addition, TCAD provides completely new paradigms in terms of documentation and reporting."

Dr. Lars Bomholt, VP of TCAD for Manufacturing at ISE, is convinced that the approach will soon become a standard way of using TCAD tools in the semiconductor industry.
"Through direct access of the relevant and up-to-date process and diagnostic information available in the databases of the manufacturing environment, the use of TCAD can be significantly broader than before. Compared with the typical approach in use today, turn-around time for TCAD simulations is dramatically reduced, enabling a much wider use of TCAD. For a manufacturing environment, TCAD provides unique possibilities for analyzing the influence of process variation onto device characteristics. Issues such as statistical process control, process and device optimization and SPICE model generation can be addressed, and TCAD information and results are available company-wide. In addition, problems related to data consistency between the manufacturing environment and the virtual TCAD world are gone once and for all."

Based on the success of this first implementation, Toshiba and ISE have begun work on extending the project to a second phase, focusing on new uses of TCAD for to save cost and time in the manufacturing environment.

Toshiba Corporation is a world leader in information and communications systems, electronic components, consumer products and power systems. The company's integration of these wide-ranging capabilities assures its position as an innovator in advanced components, products and systems. Toshiba has 188,000 employees worldwide and annual sales of over US$47 billion. Toshiba's Web site at:

ISE AG is a leading provider of TCAD tools worldwide. ISE focuses on TCAD, and offers software solutions and consulting services for the world's largest semiconductor fabrication facilities. Founded in 1993, the company is privately held with headquarters in Zurich, Switzerland, at Balgriststrasse 102, CH-8008 Zurich, and a subsidiary, ISE, Inc., located in San Jose, Calif. at 111 N. Market Street, Suite 710, San Jose, CA 95113. ISE's Web site is at:

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